Coat Developer Equipment


ZHT-150 R&D by ZHONG HONG, 150mm wafer coat&develop process, widely used in compound semiconductor GaAs,SiC, GaN , Filter and MEMS etc.

Product advantages:

  1. Integrated design small footprint more stability
  2. Support Com 100mm&150mm product
  3. Support full transparent product
  4. Support G-line, I-line process
  5. Support SECS communication
  6. Offer different design for customer special request

Independent research and development

  • Software Running
  • Mechanical Transmission
  • Circuit Module
  • Unit for Coating
Compound Semiconductor

Process capacity: > 0.18um
Products: Gallium Arsenide (GaAs),
Gallium Nitride (GaN),
Silicon Carbide (SiC), Filter (Filter)


Process capacity: > 0.18um
Product: MEMS

Silicon-based Semiconductor

Process capacity: > 90nm
Products: IGBT, CMOS, MPU, MCU,
DSP, RAM, ROM, Flash