Based on technology and supported by service

With the historical mission of bring bricks and tiles for the ‘China wisely made’. We would abide by the spirit of scientific research and the needs of our country as well as the people.
With the positive attitude of forging ahead and pioneering, we strive to leave a chapter of Z & H in the history of semiconductor equipment in the intelligent manufacturing industry.

The localized equipment for major equipment before and after lithography [gluing and developing].

TEL TRACK

TEL TRACK

Refurbishing & Remanufacture
Technical Service
Installation & Set-up
Calibration or Re-calibration
Parts Replacement
Coat & Dev Modify and Upgrade
Wafer Size Conversion
M/A, CS Arm Overhaul
WEE Lamphouse OH
CP, HP Overhaul
Heater Exchange OH
T&H, Monitor OH

Repair & Maintenance for parts

Repair / Remanufacturing

Main Arm ，C/S Arm ，WEE ，THERMO-CON ，Temp CTL , ACU, DC Power, T&H , Spin Motor & Driver , CP Unity etc.

Repair & Maintenance for parts

8-inch

Robot Overhaul

Application System : TEL Unity2e
Maker : Yaskawa Electric
Controller Model : SRC- Ⅰ or SRC-Ⅱ
Robot Type : VS2A or VS2B/VS2C/VS2E
Pre-Aligner Type : V0SJ, V0SH

Stable Transfer → Increase Up-time

Gap ass’y Overhaul

Application : SCCM, DRM, IEM, PE chamber
Chain change
Bearing Change
Balance Calibration

Transformation and Upgrading

Vacuum Arm

Mechanical arms

Main arm modify to vacuum arm, centering accurate transmit.
ETCInclude Tel Scurrber tool main arm modify.

PDP to LCD

Operation panel

PDP is easilybroken.
Improve clarity, operation more convenient for user.

External Sensor

BUFFER TANK

The internal sensor of chemical buffer tank ageing frequently and scrapping occurs.
The external sensor of buffer tank does not need to contact the chemicals, which avoids corrosion and causes the machine not to be scrapped.
The chemical level (LL, L, H, HH) of buffer tank is easy to adjust and saves time.