{"id":4259,"date":"2024-06-11T05:29:49","date_gmt":"2024-06-11T05:29:49","guid":{"rendered":"https:\/\/www.zh-et.cn\/?page_id=4259"},"modified":"2024-07-12T06:19:31","modified_gmt":"2024-07-12T06:19:31","slug":"zhr-200","status":"publish","type":"page","link":"https:\/\/www.zh-et.cn\/en\/zhr-200\/","title":{"rendered":"ZHR-200"},"content":{"rendered":"\t<section class=\"section\" id=\"section_861199908\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n\n  <div class=\"banner has-hover\" id=\"banner-1824885332\">\n          <div class=\"banner-inner fill\">\n        <div class=\"banner-bg fill\" >\n            <div class=\"bg fill bg-fill \"><\/div>\n                                    \n                    <\/div>\n        <div class=\"banner-layers container\">\n            <div class=\"fill banner-link\"><\/div>            \n   <div id=\"text-box-1744094217\" class=\"text-box banner-layer x50 md-x50 lg-x50 y50 md-y50 lg-y50 res-text\">\n                                <div class=\"text dark\">\n              \n              <div class=\"text-inner text-center\">\n                  \n\t<div id=\"text-1600847165\" class=\"text fadein\">\n\t\t\n<h1>Products<\/h1>\n<p>RTP<\/p>\n\t\t\t<\/div>\n\t\n              <\/div>\n           <\/div>\n                            \n<style>\n#text-box-1744094217 {\n  width: 60%;\n}\n#text-box-1744094217 .text {\n  font-size: 100%;\n}\n<\/style>\n    <\/div>\n \n        <\/div>\n      <\/div>\n\n            \n<style>\n#banner-1824885332 {\n  padding-top: 130px;\n}\n#banner-1824885332 .bg.bg-loaded {\n  background-image: url(https:\/\/www.zh-et.cn\/wp-content\/uploads\/2021\/12\/pbhead.jpg);\n}\n#banner-1824885332 .bg {\n  background-position: 52% 0%;\n}\n@media (min-width:550px) {\n  #banner-1824885332 {\n    padding-top: 250px;\n  }\n}\n<\/style>\n  <\/div>\n\n\n\t\t<\/div>\n\n\t\t\n<style>\n#section_861199908 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section detail-2-sec\" id=\"section_1788604388\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<div class=\"slider-wrapper relative\" id=\"slider-1028874644\" >\n    <div class=\"slider slider-nav-dots-dashes-spaced slider-nav-simple slider-nav-large slider-nav-light slider-style-normal slider-show-nav\"\n        data-flickity-options='{\n            \"cellAlign\": \"center\",\n            \"imagesLoaded\": true,\n            \"lazyLoad\": 1,\n            \"freeScroll\": false,\n            \"wrapAround\": true,\n            \"autoPlay\": 6000,\n            \"pauseAutoPlayOnHover\" : true,\n            \"prevNextButtons\": true,\n            \"contain\" : true,\n            \"adaptiveHeight\" : true,\n            \"dragThreshold\" : 10,\n            \"percentPosition\": true,\n            \"pageDots\": true,\n            \"rightToLeft\": false,\n            \"draggable\": true,\n            \"selectedAttraction\": 0.1,\n            \"parallax\" : 0,\n            \"friction\": 0.6        }'\n        >\n        \n<div class=\"row row-collapse align-center\"  id=\"row-1552300698\">\n\n\t<div id=\"col-392929674\" class=\"col medium-5 small-8 large-5\"  >\n\t\t<div class=\"col-inner\"  >\n\t\t\t\n\t\t\t\n\t<div class=\"img has-hover x md-x lg-x y md-y lg-y\" id=\"image_1163898387\">\n\t\t\t\t\t\t\t\t<div class=\"img-inner dark\" >\n\t\t\t<img width=\"464\" height=\"474\" src=\"https:\/\/www.zh-et.cn\/wp-content\/uploads\/2024\/06\/Picture2.png\" class=\"attachment-original size-original\" alt=\"\" decoding=\"async\" loading=\"lazy\" srcset=\"https:\/\/www.zh-et.cn\/wp-content\/uploads\/2024\/06\/Picture2.png 464w, https:\/\/www.zh-et.cn\/wp-content\/uploads\/2024\/06\/Picture2-294x300.png 294w\" sizes=\"(max-width: 464px) 100vw, 464px\" \/>\t\t\t\t\t\t\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t\n<style>\n#image_1163898387 {\n  width: 100%;\n}\n<\/style>\n\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n<\/div>\n     <\/div>\n\n     <div class=\"loading-spin dark large centered\"><\/div>\n\n     <\/div>\n\n\n\t<div id=\"gap-1236534478\" class=\"gap-element clearfix\" style=\"display:block; height:auto;\">\n\t\t\n<style>\n#gap-1236534478 {\n  padding-top: 60px;\n}\n<\/style>\n\t<\/div>\n\t\n\t\t<\/div>\n\n\t\t\n<style>\n#section_1788604388 {\n  padding-top: 40px;\n  padding-bottom: 40px;\n  background-color: rgb(255, 255, 255);\n}\n@media (min-width:550px) {\n  #section_1788604388 {\n    padding-top: 80px;\n    padding-bottom: 80px;\n  }\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section detail-3-sec\" id=\"section_192282954\">\n\t\t<div class=\"bg section-bg fill bg-fill  \" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<div class=\"row row-collapse align-center\"  id=\"row-646066374\">\n\n\t<div id=\"col-2049243172\" class=\"col medium-9 small-11 large-9\"  >\n\t\t<div class=\"col-inner text-center\"  >\n\t\t\t\n\t\t\t\n\t<div id=\"text-632461195\" class=\"text fadein\">\n\t\t\n<h2 class=\"primary-title\">RTP<\/h2>\n\t\t\t<\/div>\n\t\n\t<div id=\"gap-1464683816\" class=\"gap-element clearfix\" style=\"display:block; height:auto;\">\n\t\t\n<style>\n#gap-1464683816 {\n  padding-top: 20px;\n}\n<\/style>\n\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n\n\t<div id=\"col-272175823\" class=\"col medium-9 small-11 large-9\"  >\n\t\t<div class=\"col-inner text-center\"  >\n\t\t\t\n\t\t\t\n\t<div id=\"text-1128334211\" class=\"text\">\n\t\t\n<div style=\"text-align: center; max-width: 600px; margin: 0 auto;\">ZHR- 200<br \/>8\uff5e6inch<br \/>Size: 1200 x 1730 x 2045mm<br \/>Widely used in silicon-based, compound semiconductors, filters, advanced packaging, power devices, Micro LEDs and other fields.<\/div>\n<p style=\"font-weight: bold;\">Product Advantages:<\/p>\n<ol class=\"zhl-200-feature\">\n<li>Temperature range: 400~1300\u2103<\/li>\n<li>SEMI S2 certification, including toxic gas options, using NH3 for advanced applications<\/li>\n<li>Halogen lamp series: Max 1200deg.C<\/li>\n<li>Best Environmental Control <2ppm O2 - Low concentration treatment with high TPT<\/li>\n<li>Occupied area 1.8m\u00b2- High utilization of clean room space and high wafer yield per unit area<\/li>\n<li>Communication Protocol &#8211; Fast, Easy, and Efficient Maintenance<\/li>\n<\/ol>\n<div class=\"product-table table-2\">\n<table>\n<thead>\n<tr>\n<th>No<\/th>\n<th>stage<\/th>\n<th>Purpose<\/th>\n<th>Quantity<\/th>\n<th>Slot<\/th>\n<th>Technical parameters<\/th>\n<th>note<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>1<\/td>\n<td>Cassette Stage A, B<\/td>\n<td>Cassette 6\u201d or 8\u201d<\/td>\n<td>2<\/td>\n<td>25(26)<\/td>\n<td>1) Detection Sensor by Cassette Size<br \/>2) Wafer Slide Detection Sensor<\/td>\n<td>&#8211;<\/td>\n<\/tr>\n<tr>\n<td>2<\/td>\n<td>Wafer Aligner<\/td>\n<td>Wafer Centering<\/td>\n<td>1<\/td>\n<td>1<\/td>\n<td>1) Drive by Air Cylinder2) Wafer Detection Sensor3) Chuck Material : Peek<\/td>\n<td>&#8211;<\/td>\n<\/tr>\n<tr>\n<td>3<\/td>\n<td>Robot<\/td>\n<td>Wafer Conveying<\/td>\n<td>1<\/td>\n<td>1<\/td>\n<td>1) Wafer Detection Sensor (Vaccum)2) Chuck Material : Peek<\/td>\n<td>&#8211;<\/td>\n<\/tr>\n<tr>\n<td>4<\/td>\n<td>Dummy Stage<\/td>\n<td>Dummy Wafer Stock<\/td>\n<td>1<\/td>\n<td>2<\/td>\n<td>1) Stage Material : POM<\/td>\n<td>&#8211;<\/td>\n<\/tr>\n<tr>\n<td>5<\/td>\n<td>Cool Stage A, B<\/td>\n<td>Wafer Cooling<\/td>\n<td>2<\/td>\n<td>1<\/td>\n<td>1) Cooling Method : Cooling Water2) Wafer Detection Sensor3) Drive by Air Cylinde4) Stage Material : SUS 3045) Pin Material : Quartz<\/td>\n<td>&#8211;<\/td>\n<\/tr>\n<tr>\n<td>6<\/td>\n<td>Wafer Stock<\/td>\n<td>Susceptor Stock Slot<\/td>\n<td>1<\/td>\n<td>5<\/td>\n<td>1) 5-Slot (6:\u201d Wafer)2) Material : POM<\/td>\n<td>SPECIAL OPTION<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n\t\t\n<style>\n#text-1128334211 {\n  text-align: left;\n}\n<\/style>\n\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n<\/div>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_192282954 {\n  padding-top: 40px;\n  padding-bottom: 40px;\n}\n#section_192282954 .section-bg.bg-loaded {\n  background-image: url(https:\/\/www.zh-et.cn\/wp-content\/uploads\/2021\/12\/probgx2.png);\n}\n#section_192282954 .section-bg {\n  background-position: 72% 0%;\n}\n@media (min-width:550px) {\n  #section_192282954 {\n    padding-top: 78px;\n    padding-bottom: 78px;\n  }\n}\n<\/style>\n\t<\/section>\n\t\n","protected":false},"excerpt":{"rendered":"","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"page-blank.php","meta":[],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v18.9 - 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