{"id":2254,"date":"2022-01-24T00:38:27","date_gmt":"2022-01-24T00:38:27","guid":{"rendered":"https:\/\/www.zh-et.cn\/?page_id=2254"},"modified":"2024-07-12T06:19:12","modified_gmt":"2024-07-12T06:19:12","slug":"zhf-200","status":"publish","type":"page","link":"https:\/\/www.zh-et.cn\/en\/zhf-200\/","title":{"rendered":"zhf-200"},"content":{"rendered":"\t<section class=\"section\" id=\"section_2069875584\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n\n  <div class=\"banner has-hover\" id=\"banner-156951212\">\n          <div class=\"banner-inner fill\">\n        <div class=\"banner-bg fill\" >\n            <div class=\"bg fill bg-fill \"><\/div>\n                                    \n                    <\/div>\n        <div class=\"banner-layers container\">\n            <div class=\"fill banner-link\"><\/div>            \n   <div id=\"text-box-335739550\" class=\"text-box banner-layer x50 md-x50 lg-x50 y50 md-y50 lg-y50 res-text\">\n                                <div class=\"text dark\">\n              \n              <div class=\"text-inner text-center\">\n                  \n\t<div id=\"text-210387481\" class=\"text fadein\">\n\t\t\n<h1>Products<\/h1>\n<p>Vertical Furnace<\/p>\n\t\t\t<\/div>\n\t\n              <\/div>\n           <\/div>\n                            \n<style>\n#text-box-335739550 {\n  width: 60%;\n}\n#text-box-335739550 .text {\n  font-size: 100%;\n}\n<\/style>\n    <\/div>\n \n        <\/div>\n      <\/div>\n\n            \n<style>\n#banner-156951212 {\n  padding-top: 130px;\n}\n#banner-156951212 .bg.bg-loaded {\n  background-image: url(https:\/\/www.zh-et.cn\/wp-content\/uploads\/2021\/12\/pbhead.jpg);\n}\n#banner-156951212 .bg {\n  background-position: 52% 0%;\n}\n@media (min-width:550px) {\n  #banner-156951212 {\n    padding-top: 250px;\n  }\n}\n<\/style>\n  <\/div>\n\n\n\t\t<\/div>\n\n\t\t\n<style>\n#section_2069875584 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section detail-2-sec\" id=\"section_1147852165\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<div class=\"slider-wrapper relative\" id=\"slider-234546433\" >\n    <div class=\"slider slider-nav-dots-dashes-spaced slider-nav-simple slider-nav-large slider-nav-light slider-style-normal slider-show-nav\"\n        data-flickity-options='{\n            \"cellAlign\": \"center\",\n            \"imagesLoaded\": true,\n            \"lazyLoad\": 1,\n            \"freeScroll\": false,\n            \"wrapAround\": true,\n            \"autoPlay\": 6000,\n            \"pauseAutoPlayOnHover\" : true,\n            \"prevNextButtons\": true,\n            \"contain\" : true,\n            \"adaptiveHeight\" : true,\n            \"dragThreshold\" : 10,\n            \"percentPosition\": true,\n            \"pageDots\": true,\n            \"rightToLeft\": false,\n            \"draggable\": true,\n            \"selectedAttraction\": 0.1,\n            \"parallax\" : 0,\n            \"friction\": 0.6        }'\n        >\n        \n<div class=\"row row-collapse align-center\"  id=\"row-1800312655\">\n\n\t<div id=\"col-1614713019\" class=\"col medium-5 small-8 large-5\"  >\n\t\t<div class=\"col-inner\"  >\n\t\t\t\n\t\t\t\n\t<div class=\"img has-hover x md-x lg-x y md-y lg-y\" id=\"image_229861812\">\n\t\t\t\t\t\t\t\t<div class=\"img-inner dark\" >\n\t\t\t<img width=\"435\" height=\"454\" src=\"https:\/\/www.zh-et.cn\/wp-content\/uploads\/2024\/06\/Picture1.png\" class=\"attachment-original size-original\" alt=\"\" decoding=\"async\" loading=\"lazy\" srcset=\"https:\/\/www.zh-et.cn\/wp-content\/uploads\/2024\/06\/Picture1.png 435w, https:\/\/www.zh-et.cn\/wp-content\/uploads\/2024\/06\/Picture1-287x300.png 287w\" sizes=\"(max-width: 435px) 100vw, 435px\" \/>\t\t\t\t\t\t\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t\n<style>\n#image_229861812 {\n  width: 100%;\n}\n<\/style>\n\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n<\/div>\n     <\/div>\n\n     <div class=\"loading-spin dark large centered\"><\/div>\n\n     <\/div>\n\n\n\t<div id=\"gap-1223800655\" class=\"gap-element clearfix\" style=\"display:block; height:auto;\">\n\t\t\n<style>\n#gap-1223800655 {\n  padding-top: 60px;\n}\n<\/style>\n\t<\/div>\n\t\n\t\t<\/div>\n\n\t\t\n<style>\n#section_1147852165 {\n  padding-top: 40px;\n  padding-bottom: 40px;\n  background-color: rgb(255, 255, 255);\n}\n@media (min-width:550px) {\n  #section_1147852165 {\n    padding-top: 80px;\n    padding-bottom: 80px;\n  }\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section detail-3-sec\" id=\"section_567680729\">\n\t\t<div class=\"bg section-bg fill bg-fill  \" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<div class=\"row row-collapse align-center\"  id=\"row-1567495081\">\n\n\t<div id=\"col-1858515938\" class=\"col medium-9 small-11 large-9\"  >\n\t\t<div class=\"col-inner text-center\"  >\n\t\t\t\n\t\t\t\n\t<div id=\"text-4006081780\" class=\"text fadein\">\n\t\t\n<h2 class=\"primary-title\">Vertical Furnace<\/h2>\n\t\t\t<\/div>\n\t\n\t<div id=\"gap-552272052\" class=\"gap-element clearfix\" style=\"display:block; height:auto;\">\n\t\t\n<style>\n#gap-552272052 {\n  padding-top: 20px;\n}\n<\/style>\n\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n\n\t<div id=\"col-1311444849\" class=\"col medium-9 small-11 large-9\"  >\n\t\t<div class=\"col-inner text-center\"  >\n\t\t\t\n\t\t\t\n\t<div id=\"text-3067671170\" class=\"text\">\n\t\t\n<p>ZHF- 2008\uff5e6inch (Vertical furnace)<\/p>\n<p>Size: 900 x 1900 x 3060mm<\/p>\n<p>Widely used in silicon-based, compound semiconductors, filters, advanced packaging, power devices, Micro LEDs and other fields.<\/p>\n<p style=\"font-weight: bold;\">Technical parameters:<\/p>\n<ol class=\"zhl-200-feature\">\n<li>Wafer size: 200mm. (or 150mm)<\/li>\n<li>Batch size: 150wafers\/1tube<\/li>\n<li>Process pressure: atmospheric pressure\/low pressure<\/li>\n<li>Power consumption: MAX 3\u03a6, 480VAC, 200A, 60Hz<\/li>\n<li>Cooling water\uff1a5kgf\/cm2 <\/li>\n<li>Exhaust system: 1500CFM<\/li>\n<\/ol>\n<div class=\"product-table\">\n<table>\n<tr>\n<td>H2 Anneal<\/td>\n<td>Dry\/Wet Oxidation<\/td>\n<td>Alloy<\/td>\n<\/tr>\n<tr>\n<td>Forming GasAnneal<\/td>\n<td>Hi temp process (max 1300\u2103)<\/td>\n<td>LTO<\/td>\n<\/tr>\n<tr>\n<td>TEOS<\/td>\n<td>Nitride<\/td>\n<td>Poly<\/td>\n<\/tr>\n<\/table>\n<\/div>\n\t\t\n<style>\n#text-3067671170 {\n  text-align: left;\n}\n<\/style>\n\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n<\/div>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_567680729 {\n  padding-top: 40px;\n  padding-bottom: 40px;\n}\n#section_567680729 .section-bg.bg-loaded {\n  background-image: url(https:\/\/www.zh-et.cn\/wp-content\/uploads\/2021\/12\/probgx2.png);\n}\n#section_567680729 .section-bg {\n  background-position: 72% 0%;\n}\n@media (min-width:550px) {\n  #section_567680729 {\n    padding-top: 78px;\n    padding-bottom: 78px;\n  }\n}\n<\/style>\n\t<\/section>\n\t\n","protected":false},"excerpt":{"rendered":"","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"page-blank.php","meta":[],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v18.9 - 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