{"id":1869,"date":"2021-12-19T23:34:53","date_gmt":"2021-12-19T23:34:53","guid":{"rendered":"https:\/\/www.zh-et.cn\/product\/"},"modified":"2024-07-12T05:54:54","modified_gmt":"2024-07-12T05:54:54","slug":"independent-research-and-development","status":"publish","type":"page","link":"https:\/\/www.zh-et.cn\/en\/independent-research-and-development\/","title":{"rendered":"Independent research and development"},"content":{"rendered":"\t<section class=\"section\" id=\"section_2056826138\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n\n  <div class=\"banner has-hover\" id=\"banner-793168339\">\n          <div class=\"banner-inner fill\">\n        <div class=\"banner-bg fill\" >\n            <div class=\"bg fill bg-fill \"><\/div>\n                                    \n                    <\/div>\n        <div class=\"banner-layers container\">\n            <div class=\"fill banner-link\"><\/div>            \n   <div id=\"text-box-238445644\" class=\"text-box banner-layer x50 md-x50 lg-x50 y50 md-y50 lg-y50 res-text\">\n                                <div class=\"text dark\">\n              \n              <div class=\"text-inner text-center\">\n                  \n\t<div id=\"text-3172800555\" class=\"text fadein\">\n\t\t\n<h1>Products<\/h1>\n<p>Independent research and development<\/p>\n\t\t\t<\/div>\n\t\n              <\/div>\n           <\/div>\n                            \n<style>\n#text-box-238445644 {\n  width: 60%;\n}\n#text-box-238445644 .text {\n  font-size: 100%;\n}\n<\/style>\n    <\/div>\n \n        <\/div>\n      <\/div>\n\n            \n<style>\n#banner-793168339 {\n  padding-top: 130px;\n}\n#banner-793168339 .bg.bg-loaded {\n  background-image: url(https:\/\/www.zh-et.cn\/wp-content\/uploads\/2021\/12\/productbg.jpg);\n}\n@media (min-width:550px) {\n  #banner-793168339 {\n    padding-top: 250px;\n  }\n}\n<\/style>\n  <\/div>\n\n\n\t\t<\/div>\n\n\t\t\n<style>\n#section_2056826138 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section product-2-sec\" id=\"section_1515390655\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<div class=\"row row-collapse align-center\"  id=\"row-477609711\">\n\n\t<div id=\"col-1635554541\" class=\"col small-11 large-12\"  >\n\t\t<div class=\"col-inner text-center\"  >\n\t\t\t\n\t\t\t\n\t<div id=\"text-1934061602\" class=\"text fadein\">\n\t\t\n<h2 class=\"primary-title\">Necessary equipment for semiconductor chip manufacturing<\/h2>\n\t\t\t<\/div>\n\t\n\t<div id=\"gap-376928996\" class=\"gap-element clearfix\" style=\"display:block; height:auto;\">\n\t\t\n<style>\n#gap-376928996 {\n  padding-top: 20px;\n}\n@media (min-width:550px) {\n  #gap-376928996 {\n    padding-top: 30px;\n  }\n}\n<\/style>\n\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n<\/div>\n<div class=\"row row-collapse align-center\"  id=\"row-988646177\">\n\n\t<div id=\"col-1765150477\" class=\"col medium-4 small-6 large-4\"  >\n\t\t<div class=\"col-inner\"  >\n\t\t\t\n\t\t\t\n<div class=\"cate-item tech-item\">\n<div><img decoding=\"async\" src=\"\/wp-content\/uploads\/2023\/07\/ZHT-200-thumbnail.png\" \/><\/div>\n<div><a href=\"#product1\">Photoresist coating and post-exposure development in photolithography technique ZHT-200<\/a><\/div>\n<\/div>\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n\n\t<div id=\"col-1643050161\" class=\"col medium-4 small-6 large-4\"  >\n\t\t<div class=\"col-inner\"  >\n\t\t\t\n\t\t\t\n<div class=\"cate-item tech-item\">\n<div><img decoding=\"async\" src=\"\/wp-content\/uploads\/2023\/07\/ZHT-150-thumbnail.png\" \/><\/div>\n<div><a href=\"#product2\">Photoresist coating and post-exposure development in photolithography technique ZHT-150<\/a><\/div>\n<\/div>\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n\n\t<div id=\"col-1011044804\" class=\"col medium-4 small-6 large-4\"  >\n\t\t<div class=\"col-inner\"  >\n\t\t\t\n\t\t\t\n<div class=\"cate-item tech-item\">\n<div><img decoding=\"async\" src=\"\/wp-content\/uploads\/2023\/07\/ZHT-300-thumbnail.png\" \/><\/div>\n<div><a href=\"#product3\">Photoresist coating and post-exposure development in photolithography technique ZHT-300<\/a><\/div>\n<\/div>\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n\n\t<div id=\"col-1561436364\" class=\"col medium-4 small-6 large-4\"  >\n\t\t<div class=\"col-inner\"  >\n\t\t\t\n\t\t\t\n<div class=\"cate-item tech-item\">\n<div><img decoding=\"async\" src=\"\/wp-content\/uploads\/2024\/06\/Group-44.png\" \/><\/div>\n<div><a href=\"#product4\">Vertical Furnace<\/a><\/div>\n<\/div>\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n\n\t<div id=\"col-973031416\" class=\"col medium-4 small-6 large-4\"  >\n\t\t<div class=\"col-inner\"  >\n\t\t\t\n\t\t\t\n<div class=\"cate-item tech-item\">\n<div><img decoding=\"async\" src=\"\/wp-content\/uploads\/2024\/06\/Group-43.png\" \/><\/div>\n<div><a href=\"#product5\">RTP<\/a><\/div>\n<\/div>\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n\n\t<div id=\"col-1793132330\" class=\"col medium-4 small-6 large-4\"  >\n\t\t<div class=\"col-inner\"  >\n\t\t\t\n\t\t\t\n<div class=\"cate-item tech-item\">\n<div><img decoding=\"async\" src=\"\/wp-content\/uploads\/2024\/07\/zhs-200-thumbnail.png\" \/><\/div>\n<div><a href=\"#product6\">Scrubber ZHS-200<\/a><\/div>\n<\/div>\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n\n\t<div id=\"col-558879332\" class=\"col medium-4 small-6 large-4\"  >\n\t\t<div class=\"col-inner\"  >\n\t\t\t\n\t\t\t\n<div class=\"cate-item tech-item\">\n<div><img decoding=\"async\" src=\"\/wp-content\/uploads\/2023\/07\/ZHS-200-thumbnail.png\" \/><\/div>\n<div><a href=\"#product7\">Scrubber ZHS-300<\/a><\/div>\n<\/div>\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n<\/div>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_1515390655 {\n  padding-top: 40px;\n  padding-bottom: 40px;\n  background-color: rgb(255, 255, 255);\n}\n@media (min-width:550px) {\n  #section_1515390655 {\n    padding-top: 80px;\n    padding-bottom: 80px;\n  }\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section product-4-sec product-sec slider-1-en\" id=\"section_1010927113\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<span class=\"scroll-to\" data-label=\"Scroll to: #product1\" data-bullet=\"false\" data-link=\"#product1\" data-title=\"Change this\"><a name=\"product1\"><\/a><\/span>\n<div class=\"row row-collapse align-equal align-center\"  id=\"row-1177841637\">\n\n\t<div id=\"col-1031223736\" class=\"col medium-6 small-11 large-6\"  >\n\t\t<div class=\"col-inner text-left dark\"  >\n\t\t\t\n\t\t\t\n\t<div id=\"text-2468741523\" class=\"text fadein-left\">\n\t\t\n<p><img decoding=\"async\" class=\"product-img\" src=\"\/wp-content\/uploads\/2023\/07\/ZHT-200.png\" \/><br \/>\n\t\t\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n\n\t<div id=\"col-1775254108\" class=\"col medium-6 small-11 large-6\"  >\n\t\t<div class=\"col-inner text-left\"  >\n\t\t\t\n\t\t\t\n\t<div id=\"text-2603387344\" class=\"text fadein-right\">\n\t\t\n<h2 class=\"primary-title\">Coat Developer Equipment<\/h2>\n<h4>ZHT-200, 8 &#038; 6 inches or compatible<\/h4>\n\t\t\t<\/div>\n\t\n<div class=\"slider-wrapper relative content-slider fadein-right\" id=\"slider-2089749334\" >\n    <div class=\"slider slider-nav-dots-simple slider-nav-circle slider-nav-large slider-nav-light slider-style-normal\"\n        data-flickity-options='{\n            \"cellAlign\": \"center\",\n            \"imagesLoaded\": true,\n            \"lazyLoad\": 1,\n            \"freeScroll\": false,\n            \"wrapAround\": true,\n            \"autoPlay\": 2000,\n            \"pauseAutoPlayOnHover\" : true,\n            \"prevNextButtons\": false,\n            \"contain\" : true,\n            \"adaptiveHeight\" : true,\n            \"dragThreshold\" : 10,\n            \"percentPosition\": true,\n            \"pageDots\": true,\n            \"rightToLeft\": false,\n            \"draggable\": true,\n            \"selectedAttraction\": 0.1,\n            \"parallax\" : 0,\n            \"friction\": 0.6        }'\n        >\n        \n\t<section class=\"section\" id=\"section_1789120855\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<ul>\n<li>Applicable wafer size: 8 &amp; 6 inches or compatible<\/li>\n<li>Equipment size: 1850*1700*2600mm (Single block)<br \/>3110*1700*2500mm (Open-type dual block) <\/li>\n<li>Warping degree: \u00b11mm<\/li>\n<li>Application fields: Silicon based, silicon carbide, gallium nitride, filters, gallium arsenide, advanced packaging and other fields<\/li>\n<\/ul>\n<p style=\"font-weight:bold\">Product Advantages:<\/p>\n<ol class=\"zhl-200-feature\">\n<li>Able to support flexible customization of multiple units\n<\/li>\n<li>Able to support I-Line lithography machine and KRF process<\/li>\n<li>Able to support composite boards and circulating water temperature control cooling boards\n<\/li>\n<li>Able to support digital collection of process parameters<\/li>\n<li>Able to support remote monitoring system<\/li>\n<li>Able to support the EAP system<\/li>\n<\/ol>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_1789120855 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section\" id=\"section_1492169021\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<p style=\"font-weight:bold\">Technical Parameters:<\/p>\n<ol class=\"zhl-200-feature\">\n<li>Speed range: 0-6000rpm\n<\/li>\n<li>Acceleration range: 0-50000rpm\/sec<\/li>\n<li>Speed accuracy: \u00b1 1rpm\n<\/li>\n<li>Hot plate temperature range: 50-200 \u2103\n<\/li>\n<li>Temperature uniformity of hot plate:<br \/>50.0\u2103 ~ 120.0\u2103 : Range \u2264 0.4\u2103<br \/>\n120.1\u2103 ~ 150.0\u2103 : Range \u2264 0.8\u2103<br \/>\n150.1\u2103 ~ 200.0\u2103 : Range \u2264 1.2\u2103<\/li>\n<li>Cold Plate Temperature Range: 20-30\u2103\n<\/li>\n<li>Uniformity of cold plate temperature: \u00b10.2\u2103\n<\/li>\n<li>Applicable photoresist: Max20000CP\n<\/li>\n<li>Rubber pump type: Cylinder\/Motor Type pump\n<\/li>\n<li>Photoresist or developer tubing: PFA\n<\/li>\n<li>Traffic monitoring: Flowmeter + Contra ejaculation sensor\/Fin flow\/ ultrasonic flowmeter\n<\/li>\n<\/ol>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_1492169021 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n}\n<\/style>\n\t<\/section>\n\t\n     <\/div>\n\n     <div class=\"loading-spin dark large centered\"><\/div>\n\n     <\/div>\n\n\n\t<div id=\"text-2746386317\" class=\"text fadein-right\">\n\t\t\n<div><a class=\"button secondaryis-outline\" href=\"\/en\/zht-200\">Details<\/a><\/div>\n\t\t\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n<\/div>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_1010927113 {\n  padding-top: 20px;\n  padding-bottom: 20px;\n  background-color: rgb(255, 255, 255);\n}\n@media (min-width:550px) {\n  #section_1010927113 {\n    padding-top: 0px;\n    padding-bottom: 0px;\n  }\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section product-6-sec product-sec slider-1-en\" id=\"section_726180666\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<span class=\"scroll-to\" data-label=\"Scroll to: #product2\" data-bullet=\"false\" data-link=\"#product2\" data-title=\"Change this\"><a name=\"product2\"><\/a><\/span>\n<div class=\"row row-collapse align-equal align-center\"  id=\"row-154079597\">\n\n\t<div id=\"col-473106866\" class=\"col medium-6 small-11 large-6\"  >\n\t\t<div class=\"col-inner text-left dark\"  >\n\t\t\t\n\t\t\t\n\t<div id=\"text-712780214\" class=\"text fadein-left\">\n\t\t\n<p><img decoding=\"async\" class=\"product-img\" src=\"\/wp-content\/uploads\/2023\/07\/ZHT-150-cropped.png\" \/><br \/>\n\t\t\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n\n\t<div id=\"col-1543352913\" class=\"col medium-6 small-11 large-6\"  >\n\t\t<div class=\"col-inner text-left dark\"  >\n\t\t\t\n\t\t\t\n\t<div id=\"text-352465559\" class=\"text fadein-right\">\n\t\t\n<h2 class=\"primary-title\">Coat Developer Equipment<\/h2>\n<h4>ZHT-150<\/h4>\n\t\t\t<\/div>\n\t\n<div class=\"slider-wrapper relative content-slider fadein-right\" id=\"slider-1433463097\" >\n    <div class=\"slider slider-nav-dots-simple slider-nav-circle slider-nav-large slider-nav-light slider-style-normal\"\n        data-flickity-options='{\n            \"cellAlign\": \"center\",\n            \"imagesLoaded\": true,\n            \"lazyLoad\": 1,\n            \"freeScroll\": false,\n            \"wrapAround\": true,\n            \"autoPlay\": 2000,\n            \"pauseAutoPlayOnHover\" : true,\n            \"prevNextButtons\": false,\n            \"contain\" : true,\n            \"adaptiveHeight\" : true,\n            \"dragThreshold\" : 10,\n            \"percentPosition\": true,\n            \"pageDots\": true,\n            \"rightToLeft\": false,\n            \"draggable\": true,\n            \"selectedAttraction\": 0.1,\n            \"parallax\" : 0,\n            \"friction\": 0.6        }'\n        >\n        \n\t<section class=\"section\" id=\"section_1327680661\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<ul>\n<li>Applicable wafer size: 6 &amp; 4 inches or compatible<\/li>\n<li>Equipment size: 1750*1820*2850mm<\/li>\n<li>Warping degree: \u00b10.3mm<\/li>\n<li>Application fields: optical communication, compound semiconductors, power devices, Micro LEDs, etc<\/li>\n<\/ul>\n<p style=\"font-weight:bold\">Product Advantages:<\/p>\n<ol class=\"zhl-200-feature\">\n<li>Integrated design, with small equipment footprint and high stability\n<\/li>\n<li>Able to support G-line and I-Line processes\n<\/li>\n<li>Customized function development can be carried out according to customer requirements<\/li>\n<li>Localization of components with high cost-effectiveness<\/li>\n<li>Able to support SECS communication<\/li>\n<\/ol>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_1327680661 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section\" id=\"section_1949463802\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<p style=\"font-weight:bold\">Technical Parameters:<\/p>\n<ol class=\"zhl-200-feature\">\n<li>Speed range: 0-6000rpm\n<\/li>\n<li>Acceleration range: 0-50000rpm\/sec<\/li>\n<li>Speed accuracy: \u00b1 1rpm\n<\/li>\n<li>Hot plate temperature range: 50-200 \u2103\n<\/li>\n<li>Temperature uniformity of hot plate:<br \/>50.0\u2103 ~ 120.0\u2103 : Range \u2264 0.4\u2103<br \/>\n120.1\u2103 ~ 150.0\u2103 : Range \u2264 0.8\u2103<br \/>\n150.1\u2103 ~ 200.0\u2103 : Range \u2264 1.2\u2103<\/li>\n<li>Cold Plate Temperature Range: 20-30\u2103\n<\/li>\n<li>Uniformity of cold plate temperature: \u00b12\u2103\n<\/li>\n<li>Applicable photoresist: Max 800CP\n<\/li>\n<li>Rubber pump type: Cylinder\/Motor Type pump\n<\/li>\n<li>Photoresist or developer tubing: PFA\n<\/li>\n<li>Traffic monitoring: Flowmeter + Contra ejaculation sensor\n<\/li>\n<\/ol>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_1949463802 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n}\n<\/style>\n\t<\/section>\n\t\n     <\/div>\n\n     <div class=\"loading-spin dark large centered\"><\/div>\n\n     <\/div>\n\n\n\t<div id=\"text-3257712045\" class=\"text fadein-right\">\n\t\t\n<div><a class=\"button white\" href=\"\/en\/equipment-zht-150\/\">Details<\/a><\/div>\n\t\t\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n<\/div>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_726180666 {\n  padding-top: 20px;\n  padding-bottom: 20px;\n  background-color: rgb(255, 255, 255);\n}\n@media (min-width:550px) {\n  #section_726180666 {\n    padding-top: 0px;\n    padding-bottom: 0px;\n  }\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section product-4-sec product-sec\" id=\"section_1719900817\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<span class=\"scroll-to\" data-label=\"Scroll to: #product3\" data-bullet=\"false\" data-link=\"#product3\" data-title=\"Change this\"><a name=\"product3\"><\/a><\/span>\n<div class=\"row row-collapse align-equal align-center\"  id=\"row-1510276657\">\n\n\t<div id=\"col-867570532\" class=\"col medium-6 small-11 large-6\"  >\n\t\t<div class=\"col-inner text-left dark\"  >\n\t\t\t\n\t\t\t\n\t<div id=\"text-1595512995\" class=\"text fadein-left\">\n\t\t\n<p><img decoding=\"async\" class=\"product-img\" src=\"\/wp-content\/uploads\/2023\/07\/ZHT-300.png\" \/><br \/>\n\t\t\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n\n\t<div id=\"col-1549719233\" class=\"col medium-6 small-11 large-6\"  >\n\t\t<div class=\"col-inner text-left\"  >\n\t\t\t\n\t\t\t\n\t<div id=\"text-1027837251\" class=\"text fadein-right\">\n\t\t\n<h2 class=\"primary-title\">Coat Developer Equipment<\/h2>\n<h4>ZHT-300, 12&#038;8inch<\/h4>\n<p>Application fields: Silicon based PI technology, advanced packaging and other fields.<\/p>\n<p style=\"font-weight: bold;\">Product advantages:<\/p>\n<ol class=\"zhl-200-feature\">\n<li>Connecting to the lithography machine and complete the automated production of the lithography process<\/li>\n<li>Meeting the high-precision process requirements with self-developed high-precision cold and hot plates<\/li>\n<li>Compatible with both products 200mm\/300mm<\/li>\n<li>Stacked structural layout with high output per unit area<\/li>\n<li>Able to support SECS communication and AMHS system<\/li>\n<li>Able to configure equipment according to customer requirements<\/li>\n<li>Localization of components, reducing costs significantly<\/li>\n<\/ol>\n<div><a class=\"button secondaryis-outline\" href=\"\/en\/zht-300\">Details<\/a><\/div>\n\t\t\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n<\/div>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_1719900817 {\n  padding-top: 20px;\n  padding-bottom: 20px;\n  background-color: rgb(255, 255, 255);\n}\n@media (min-width:550px) {\n  #section_1719900817 {\n    padding-top: 0px;\n    padding-bottom: 0px;\n  }\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section product-5-sec product-sec slider-2-en\" id=\"section_784663980\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<span class=\"scroll-to\" data-label=\"Scroll to: #product4\" data-bullet=\"false\" data-link=\"#product4\" data-title=\"Change this\"><a name=\"product4\"><\/a><\/span>\n<div class=\"row row-collapse align-equal align-center\"  id=\"row-1084416019\">\n\n\t<div id=\"col-1059125267\" class=\"col medium-6 small-11 large-6\"  >\n\t\t<div class=\"col-inner text-left dark\"  >\n\t\t\t\n\t\t\t\n\t<div id=\"text-3638797030\" class=\"text fadein-left\">\n\t\t\n<h2 class=\"primary-title\">Vertical Furnace<\/h2>\n<h4>ZHL-200, 8\uff5e6inch<\/h4>\n\t\t\t<\/div>\n\t\n<div class=\"slider-wrapper relative content-slider fadein-left\" id=\"slider-554577563\" >\n    <div class=\"slider slider-nav-dots-simple slider-nav-circle slider-nav-large slider-nav-light slider-style-normal\"\n        data-flickity-options='{\n            \"cellAlign\": \"center\",\n            \"imagesLoaded\": true,\n            \"lazyLoad\": 1,\n            \"freeScroll\": false,\n            \"wrapAround\": true,\n            \"autoPlay\": 2000,\n            \"pauseAutoPlayOnHover\" : true,\n            \"prevNextButtons\": false,\n            \"contain\" : true,\n            \"adaptiveHeight\" : true,\n            \"dragThreshold\" : 10,\n            \"percentPosition\": true,\n            \"pageDots\": true,\n            \"rightToLeft\": false,\n            \"draggable\": true,\n            \"selectedAttraction\": 0.1,\n            \"parallax\" : 0,\n            \"friction\": 0.6        }'\n        >\n        \n\t<section class=\"section\" id=\"section_2037367810\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<p>(Vertical furnace)<\/p>\n<p>Size: 900 x 1900 x 3060mm<\/p>\n<p>Widely used in silicon-based, compound semiconductors, filters, advanced packaging, power devices, Micro LEDs and other fields.<\/p>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_2037367810 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section\" id=\"section_828613582\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<p style=\"font-weight: bold;\">Technical Parameters:\n<\/p>\n<ol class=\"zhl-200-feature\">\n<li>Wafer size: 200mm. (or 150mm)\n<\/li>\n<li>Batch size: 150wafers\/1tube\n<\/li>\n<li>Process pressure: atmospheric pressure\/low pressure\n<\/li>\n<li>Power consumption: MAX 3\u03a6, 480VAC, 200A, 60Hz\n<\/li>\n<li>Cooling water\uff1a5kgf\/cm2 <\/li>\n<li>Exhaust system: 1500CFM<\/li>\n<\/ol>\n<div class=\"product-table\">\n<table>\n<tbody>\n<tr>\n<td>H2 Anneal\n<\/td>\n<td>Dry\/Wet Oxidation<\/td>\n<td>Alloy\n<\/td>\n<\/tr>\n<tr>\n<td>Forming Gas<br \/>\nAnneal<\/td>\n<td>Hi temp process (max 1300\u2103)\n<\/td>\n<td>LTO\n<\/td>\n<\/tr>\n<tr>\n<td>TEOS\n<\/td>\n<td>Nitride\n<\/td>\n<td>Poly\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_828613582 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n}\n<\/style>\n\t<\/section>\n\t\n     <\/div>\n\n     <div class=\"loading-spin dark large centered\"><\/div>\n\n     <\/div>\n\n\n\t<div id=\"text-1182330824\" class=\"text fadein-left\">\n\t\t\n<div><a class=\"button white\" href=\"\/en\/zhf-200\">Details<\/a><\/div>\n\t\t\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n\n\t<div id=\"col-958184985\" class=\"col medium-6 small-11 large-6\"  >\n\t\t<div class=\"col-inner text-left dark\"  >\n\t\t\t\n\t\t\t\n<div class=\"absolute-img\"><img decoding=\"async\" src=\"\/wp-content\/uploads\/2021\/12\/rightbgx1.png\" \/><\/div>\n<div class=\"fadein-right\"><img decoding=\"async\" class=\"product-img\" src=\"\/wp-content\/uploads\/2024\/06\/Picture1.png\" \/><\/div>\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n<\/div>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_784663980 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n  background-color: rgb(255, 255, 255);\n}\n@media (min-width:550px) {\n  #section_784663980 {\n    padding-top: 0px;\n    padding-bottom: 0px;\n  }\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section product-6-sec product-sec slider-3-en\" id=\"section_1238882061\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<span class=\"scroll-to\" data-label=\"Scroll to: #product5\" data-bullet=\"false\" data-link=\"#product5\" data-title=\"Change this\"><a name=\"product5\"><\/a><\/span>\n<div class=\"row row-collapse align-equal align-center\"  id=\"row-1086238028\">\n\n\t<div id=\"col-1808706531\" class=\"col medium-6 small-11 large-6\"  >\n\t\t<div class=\"col-inner text-left dark\"  >\n\t\t\t\n\t\t\t\n\t<div id=\"text-3053350390\" class=\"text fadein-left\">\n\t\t\n<p><img decoding=\"async\" class=\"product-img\" src=\"\/wp-content\/uploads\/2024\/06\/Picture2.png\" \/><br \/>\n\t\t\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n\n\t<div id=\"col-1908071640\" class=\"col medium-6 small-11 large-6\"  >\n\t\t<div class=\"col-inner text-left dark\"  >\n\t\t\t\n\t\t\t\n\t<div id=\"text-2936335154\" class=\"text fadein-right\">\n\t\t\n<h2 class=\"primary-title\">RTP<\/h2>\n<h4>ZHR-200, 8\uff5e6inch<\/h4>\n\t\t\t<\/div>\n\t\n<div class=\"slider-wrapper relative content-slider fadein-right\" id=\"slider-1612231828\" >\n    <div class=\"slider slider-nav-dots-simple slider-nav-circle slider-nav-large slider-nav-light slider-style-normal\"\n        data-flickity-options='{\n            \"cellAlign\": \"center\",\n            \"imagesLoaded\": true,\n            \"lazyLoad\": 1,\n            \"freeScroll\": false,\n            \"wrapAround\": true,\n            \"autoPlay\": 2000,\n            \"pauseAutoPlayOnHover\" : true,\n            \"prevNextButtons\": false,\n            \"contain\" : true,\n            \"adaptiveHeight\" : true,\n            \"dragThreshold\" : 10,\n            \"percentPosition\": true,\n            \"pageDots\": true,\n            \"rightToLeft\": false,\n            \"draggable\": true,\n            \"selectedAttraction\": 0.1,\n            \"parallax\" : 0,\n            \"friction\": 0.6        }'\n        >\n        \n\t<section class=\"section\" id=\"section_1761358944\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<p>Size: 1200 x 1730 x 2045mm<\/p>\n<p>>Widely used in silicon-based, compound semiconductors, filters, advanced packaging, power devices, Micro LEDs and other fields.<\/p>\n<p style=\"font-weight: bold;\">Product Advantages:<\/p>\n<ol class=\"zhl-200-feature\">\n<li>Temperature range: 400~1300\u2103<\/li>\n<li>SEMI S2 certification, including toxic gas options, using NH3 for advanced applications<\/li>\n<li>Halogen lamp series: Max 1200deg.C<\/li>\n<li>Best Environmental Control &lt;2ppm O2 &#8211; Low concentration treatment with high TPT<\/li>\n<li>Occupied area 1.8m\u00b2- High utilization of clean room space and high wafer yield per unit area<\/li>\n<li>Communication Protocol \u2013 Fast, Easy, and Efficient Maintenance<\/li>\n<\/ol>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_1761358944 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section\" id=\"section_1473498761\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<div class=\"product-table table-2\">\n<table>\n<thead>\n<tr>\n<th>No<\/th>\n<th>stage<\/th>\n<th>Purpose<\/th>\n<th>Quantity<\/th>\n<th>Slot<\/th>\n<th>Technical parameters<\/th>\n<th>note<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>1<\/td>\n<td>Cassette Stage A, B<\/td>\n<td>Cassette 6\u201d or 8\u201d<\/td>\n<td>2<\/td>\n<td>25(26)<\/td>\n<td>1) Detection Sensor by Cassette Size<br \/>2) Wafer Slide Detection Sensor<\/td>\n<td>\u2013<\/td>\n<\/tr>\n<tr>\n<td>2<\/td>\n<td>Wafer Aligner<\/td>\n<td>Wafer Centering<\/td>\n<td>1<\/td>\n<td>1<\/td>\n<td>1) Drive by Air Cylinder2) Wafer Detection Sensor3) Chuck Material : Peek<\/td>\n<td>\u2013<\/td>\n<\/tr>\n<tr>\n<td>3<\/td>\n<td>Robot<\/td>\n<td>Wafer Conveying<\/td>\n<td>1<\/td>\n<td>1<\/td>\n<td>1) Wafer Detection Sensor (Vaccum)2) Chuck Material : Peek<\/td>\n<td>\u2013<\/td>\n<\/tr>\n<tr>\n<td>4<\/td>\n<td>Dummy Stage<\/td>\n<td>Dummy Wafer Stock<\/td>\n<td>1<\/td>\n<td>2<\/td>\n<td>1) Stage Material : POM<\/td>\n<td>\u2013<\/td>\n<\/tr>\n<tr>\n<td>5<\/td>\n<td>Cool Stage A, B<\/td>\n<td>Wafer Cooling<\/td>\n<td>2<\/td>\n<td>1<\/td>\n<td>1) Cooling Method : Cooling Water2) Wafer Detection Sensor3) Drive by Air Cylinde4) Stage Material : SUS 3045) Pin Material : Quartz<\/td>\n<td>\u2013<\/td>\n<\/tr>\n<tr>\n<td>6<\/td>\n<td>Wafer Stock<\/td>\n<td>Susceptor Stock Slot<\/td>\n<td>1<\/td>\n<td>5<\/td>\n<td>1) 5-Slot (6:\u201d Wafer)2) Material : POM<\/td>\n<td>SPECIAL OPTION<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_1473498761 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n}\n<\/style>\n\t<\/section>\n\t\n     <\/div>\n\n     <div class=\"loading-spin dark large centered\"><\/div>\n\n     <\/div>\n\n\n\t<div id=\"text-1480586302\" class=\"text fadein-right\">\n\t\t\n<div><a class=\"button white\" href=\"\/en\/zhr-200\/\">Details<\/a><\/div>\n\t\t\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n<\/div>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_1238882061 {\n  padding-top: 20px;\n  padding-bottom: 20px;\n  background-color: rgb(255, 255, 255);\n}\n@media (min-width:550px) {\n  #section_1238882061 {\n    padding-top: 0px;\n    padding-bottom: 0px;\n  }\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section product-5-sec product-sec slider-4-en\" id=\"section_794658470\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<span class=\"scroll-to\" data-label=\"Scroll to: #product6\" data-bullet=\"false\" data-link=\"#product6\" data-title=\"Change this\"><a name=\"product6\"><\/a><\/span>\n<div class=\"row row-collapse align-equal align-center\"  id=\"row-983472023\">\n\n\t<div id=\"col-984318990\" class=\"col medium-6 small-11 large-6\"  >\n\t\t<div class=\"col-inner text-left dark\"  >\n\t\t\t\n\t\t\t\n\t<div id=\"text-1127397189\" class=\"text fadein-left\">\n\t\t\n<h2 class=\"primary-title\">Single wafer Scrubber clean tool<br \/>\n<\/h2>\n<h4>ZHS-200, 8~6inch<\/h4>\n\t\t\t<\/div>\n\t\n<div class=\"slider-wrapper relative content-slider fadein-left\" id=\"slider-346643723\" >\n    <div class=\"slider slider-nav-dots-simple slider-nav-circle slider-nav-large slider-nav-light slider-style-normal\"\n        data-flickity-options='{\n            \"cellAlign\": \"center\",\n            \"imagesLoaded\": true,\n            \"lazyLoad\": 1,\n            \"freeScroll\": false,\n            \"wrapAround\": true,\n            \"autoPlay\": 2000,\n            \"pauseAutoPlayOnHover\" : true,\n            \"prevNextButtons\": false,\n            \"contain\" : true,\n            \"adaptiveHeight\" : true,\n            \"dragThreshold\" : 10,\n            \"percentPosition\": true,\n            \"pageDots\": true,\n            \"rightToLeft\": false,\n            \"draggable\": true,\n            \"selectedAttraction\": 0.1,\n            \"parallax\" : 0,\n            \"friction\": 0.6        }'\n        >\n        \n\t<section class=\"section\" id=\"section_1700388763\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<p>4 positive configurations WPH \uff1e160 pieces<br \/>2 positive and 2 negative configurations WPH \uff1e100 pieces<\/p>\n<p style=\"text-align: left; font-weight: bold;\">Application fields:<\/p>\n<p>Silicon based, compound semiconductors, filters, advanced packaging, power devices, Micro LEDs and other fields.<\/p>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_1700388763 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section\" id=\"section_688044464\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<p style=\"text-align: left; font-weight: bold;\">Product advantages:<\/p>\n<ol class=\"zhl-200-feature\">\n<li style=\"text-align: left;\">High quality \u2013 CLASS 10 environmental level; Static elimination system<\/li>\n<li>Diversity \u2013 different cleaning methods meet the needs of different processes<\/li>\n<li>Customization \u2013 configure according to customer needs<\/li>\n<li>Progressiveness \u2013 the latest operating system, software function diversity<\/li>\n<\/ol>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_688044464 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n}\n<\/style>\n\t<\/section>\n\t\n     <\/div>\n\n     <div class=\"loading-spin dark large centered\"><\/div>\n\n     <\/div>\n\n\n\t<div id=\"text-2230693924\" class=\"text fadein-left\">\n\t\t\n<div><a class=\"button white\" href=\"\/en\/zhs-200\/\">Details<\/a><\/div>\n\t\t\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n\n\t<div id=\"col-339707403\" class=\"col medium-6 small-11 large-6\"  >\n\t\t<div class=\"col-inner text-left dark\"  >\n\t\t\t\n\t\t\t\n<div class=\"absolute-img\"><img decoding=\"async\" src=\"\/wp-content\/uploads\/2021\/12\/rightbgx1.png\" \/><\/div>\n<div class=\"fadein-right\"><img decoding=\"async\" class=\"product-img\" src=\"\/wp-content\/uploads\/2024\/06\/Picturex.png\" \/><\/div>\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n<\/div>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_794658470 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n  background-color: rgb(255, 255, 255);\n}\n@media (min-width:550px) {\n  #section_794658470 {\n    padding-top: 0px;\n    padding-bottom: 0px;\n  }\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section product-6-sec product-sec slider-4-en\" id=\"section_1692242323\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<span class=\"scroll-to\" data-label=\"Scroll to: #product7\" data-bullet=\"false\" data-link=\"#product7\" data-title=\"Change this\"><a name=\"product7\"><\/a><\/span>\n<div class=\"row row-collapse align-equal align-center\"  id=\"row-1290894966\">\n\n\t<div id=\"col-1823321144\" class=\"col medium-6 small-11 large-6\"  >\n\t\t<div class=\"col-inner text-left dark\"  >\n\t\t\t\n\t\t\t\n\t<div id=\"text-116085302\" class=\"text fadein-left\">\n\t\t\n<p><img decoding=\"async\" class=\"product-img\" src=\"\/wp-content\/uploads\/2023\/07\/ZHS-200-cropped.png\" \/><br \/>\n\t\t\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n\n\t<div id=\"col-1361438517\" class=\"col medium-6 small-11 large-6\"  >\n\t\t<div class=\"col-inner text-left dark\"  >\n\t\t\t\n\t\t\t\n\t<div id=\"text-2107166204\" class=\"text fadein-right\">\n\t\t\n<h2 class=\"primary-title\">Single wafer Scrubber clean tool<\/h2>\n<h4>ZHS-300, 12\uff5e8inch<\/h4>\n\t\t\t<\/div>\n\t\n<div class=\"slider-wrapper relative content-slider fadein-right\" id=\"slider-323532024\" >\n    <div class=\"slider slider-nav-dots-simple slider-nav-circle slider-nav-large slider-nav-light slider-style-normal\"\n        data-flickity-options='{\n            \"cellAlign\": \"center\",\n            \"imagesLoaded\": true,\n            \"lazyLoad\": 1,\n            \"freeScroll\": false,\n            \"wrapAround\": true,\n            \"autoPlay\": 2000,\n            \"pauseAutoPlayOnHover\" : true,\n            \"prevNextButtons\": false,\n            \"contain\" : true,\n            \"adaptiveHeight\" : true,\n            \"dragThreshold\" : 10,\n            \"percentPosition\": true,\n            \"pageDots\": true,\n            \"rightToLeft\": false,\n            \"draggable\": true,\n            \"selectedAttraction\": 0.1,\n            \"parallax\" : 0,\n            \"friction\": 0.6        }'\n        >\n        \n\t<section class=\"section\" id=\"section_1201068436\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<p>8 positive configurations WPH \uff1e380 pieces<br \/>4 positive and 4 negative configurations WPH \uff1e200 pieces<\/p>\n<p style=\"text-align: left; font-weight: bold;\">Application fields:<\/p>\n<p>Silicon based, compound semiconductors, filters, advanced packaging, power devices, Micro LEDs and other fields.<\/p>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_1201068436 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section\" id=\"section_1981822340\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<p style=\"text-align: left; font-weight: bold;\">Product advantages:<\/p>\n<ol class=\"zhl-200-feature\">\n<li style=\"text-align: left;\">High quality \u2013 CLASS 10 environmental level; Static elimination system<\/li>\n<li>Diversity \u2013 different cleaning methods meet the needs of different processes<\/li>\n<li>Customization \u2013 configure according to customer needs<\/li>\n<li>Progressiveness \u2013 the latest operating system, software function diversity<\/li>\n<\/ol>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_1981822340 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n}\n<\/style>\n\t<\/section>\n\t\n     <\/div>\n\n     <div class=\"loading-spin dark large centered\"><\/div>\n\n     <\/div>\n\n\n\t<div id=\"text-327788712\" class=\"text fadein-right\">\n\t\t\n<div><a class=\"button white\" href=\"\/en\/zhs-300\/\">Details<\/a><\/div>\n\t\t\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n<\/div>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_1692242323 {\n  padding-top: 20px;\n  padding-bottom: 20px;\n  background-color: rgb(255, 255, 255);\n}\n@media (min-width:550px) {\n  #section_1692242323 {\n    padding-top: 0px;\n    padding-bottom: 0px;\n  }\n}\n<\/style>\n\t<\/section>\n\t\n","protected":false},"excerpt":{"rendered":"","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"page-blank.php","meta":[],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v18.9 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Independent research and development - \u4f17\u9e3f\u534a\u5bfc\u4f53<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.zh-et.cn\/en\/independent-research-and-development\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Independent research 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