{"id":1869,"date":"2021-12-19T23:34:53","date_gmt":"2021-12-19T23:34:53","guid":{"rendered":"https:\/\/www.zh-et.cn\/product\/"},"modified":"2024-07-12T05:54:54","modified_gmt":"2024-07-12T05:54:54","slug":"independent-research-and-development","status":"publish","type":"page","link":"https:\/\/www.zh-et.cn\/en\/independent-research-and-development\/","title":{"rendered":"Independent research and development"},"content":{"rendered":"\t<section class=\"section\" id=\"section_916693925\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n\n  <div class=\"banner has-hover\" id=\"banner-1713645389\">\n          <div class=\"banner-inner fill\">\n        <div class=\"banner-bg fill\" >\n            <div class=\"bg fill bg-fill \"><\/div>\n                                    \n                    <\/div>\n        <div class=\"banner-layers container\">\n            <div class=\"fill banner-link\"><\/div>            \n   <div id=\"text-box-135847236\" class=\"text-box banner-layer x50 md-x50 lg-x50 y50 md-y50 lg-y50 res-text\">\n                                <div class=\"text dark\">\n              \n              <div class=\"text-inner text-center\">\n                  \n\t<div id=\"text-1978994320\" class=\"text fadein\">\n\t\t\n<h1>Products<\/h1>\n<p>Independent research and development<\/p>\n\t\t\t<\/div>\n\t\n              <\/div>\n           <\/div>\n                            \n<style>\n#text-box-135847236 {\n  width: 60%;\n}\n#text-box-135847236 .text {\n  font-size: 100%;\n}\n<\/style>\n    <\/div>\n \n        <\/div>\n      <\/div>\n\n            \n<style>\n#banner-1713645389 {\n  padding-top: 130px;\n}\n#banner-1713645389 .bg.bg-loaded {\n  background-image: url(https:\/\/www.zh-et.cn\/wp-content\/uploads\/2021\/12\/productbg.jpg);\n}\n@media (min-width:550px) {\n  #banner-1713645389 {\n    padding-top: 250px;\n  }\n}\n<\/style>\n  <\/div>\n\n\n\t\t<\/div>\n\n\t\t\n<style>\n#section_916693925 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section product-2-sec\" id=\"section_140479479\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<div class=\"row row-collapse align-center\"  id=\"row-119741193\">\n\n\t<div id=\"col-128672454\" class=\"col small-11 large-12\"  >\n\t\t<div class=\"col-inner text-center\"  >\n\t\t\t\n\t\t\t\n\t<div id=\"text-2591842173\" class=\"text fadein\">\n\t\t\n<h2 class=\"primary-title\">Necessary equipment for semiconductor chip manufacturing<\/h2>\n\t\t\t<\/div>\n\t\n\t<div id=\"gap-1200976590\" class=\"gap-element clearfix\" style=\"display:block; height:auto;\">\n\t\t\n<style>\n#gap-1200976590 {\n  padding-top: 20px;\n}\n@media (min-width:550px) {\n  #gap-1200976590 {\n    padding-top: 30px;\n  }\n}\n<\/style>\n\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n<\/div>\n<div class=\"row row-collapse align-center\"  id=\"row-896619645\">\n\n\t<div id=\"col-1853126950\" class=\"col medium-4 small-6 large-4\"  >\n\t\t<div class=\"col-inner\"  >\n\t\t\t\n\t\t\t\n<div class=\"cate-item tech-item\">\n<div><img decoding=\"async\" src=\"\/wp-content\/uploads\/2023\/07\/ZHT-200-thumbnail.png\" \/><\/div>\n<div><a href=\"#product1\">Photoresist coating and post-exposure development in photolithography technique ZHT-200<\/a><\/div>\n<\/div>\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n\n\t<div id=\"col-489838683\" class=\"col medium-4 small-6 large-4\"  >\n\t\t<div class=\"col-inner\"  >\n\t\t\t\n\t\t\t\n<div class=\"cate-item tech-item\">\n<div><img decoding=\"async\" src=\"\/wp-content\/uploads\/2023\/07\/ZHT-150-thumbnail.png\" \/><\/div>\n<div><a href=\"#product2\">Photoresist coating and post-exposure development in photolithography technique ZHT-150<\/a><\/div>\n<\/div>\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n\n\t<div id=\"col-1631962989\" class=\"col medium-4 small-6 large-4\"  >\n\t\t<div class=\"col-inner\"  >\n\t\t\t\n\t\t\t\n<div class=\"cate-item tech-item\">\n<div><img decoding=\"async\" src=\"\/wp-content\/uploads\/2023\/07\/ZHT-300-thumbnail.png\" \/><\/div>\n<div><a href=\"#product3\">Photoresist coating and post-exposure development in photolithography technique ZHT-300<\/a><\/div>\n<\/div>\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n\n\t<div id=\"col-327575341\" class=\"col medium-4 small-6 large-4\"  >\n\t\t<div class=\"col-inner\"  >\n\t\t\t\n\t\t\t\n<div class=\"cate-item tech-item\">\n<div><img decoding=\"async\" src=\"\/wp-content\/uploads\/2024\/06\/Group-44.png\" \/><\/div>\n<div><a href=\"#product4\">Vertical Furnace<\/a><\/div>\n<\/div>\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n\n\t<div id=\"col-1773494528\" class=\"col medium-4 small-6 large-4\"  >\n\t\t<div class=\"col-inner\"  >\n\t\t\t\n\t\t\t\n<div class=\"cate-item tech-item\">\n<div><img decoding=\"async\" src=\"\/wp-content\/uploads\/2024\/06\/Group-43.png\" \/><\/div>\n<div><a href=\"#product5\">RTP<\/a><\/div>\n<\/div>\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n\n\t<div id=\"col-1948594094\" class=\"col medium-4 small-6 large-4\"  >\n\t\t<div class=\"col-inner\"  >\n\t\t\t\n\t\t\t\n<div class=\"cate-item tech-item\">\n<div><img decoding=\"async\" src=\"\/wp-content\/uploads\/2024\/07\/zhs-200-thumbnail.png\" \/><\/div>\n<div><a href=\"#product6\">Scrubber ZHS-200<\/a><\/div>\n<\/div>\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n\n\t<div id=\"col-40871260\" class=\"col medium-4 small-6 large-4\"  >\n\t\t<div class=\"col-inner\"  >\n\t\t\t\n\t\t\t\n<div class=\"cate-item tech-item\">\n<div><img decoding=\"async\" src=\"\/wp-content\/uploads\/2023\/07\/ZHS-200-thumbnail.png\" \/><\/div>\n<div><a href=\"#product7\">Scrubber ZHS-300<\/a><\/div>\n<\/div>\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n<\/div>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_140479479 {\n  padding-top: 40px;\n  padding-bottom: 40px;\n  background-color: rgb(255, 255, 255);\n}\n@media (min-width:550px) {\n  #section_140479479 {\n    padding-top: 80px;\n    padding-bottom: 80px;\n  }\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section product-4-sec product-sec slider-1-en\" id=\"section_1645224980\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<span class=\"scroll-to\" data-label=\"Scroll to: #product1\" data-bullet=\"false\" data-link=\"#product1\" data-title=\"Change this\"><a name=\"product1\"><\/a><\/span>\n<div class=\"row row-collapse align-equal align-center\"  id=\"row-1637642466\">\n\n\t<div id=\"col-1165839043\" class=\"col medium-6 small-11 large-6\"  >\n\t\t<div class=\"col-inner text-left dark\"  >\n\t\t\t\n\t\t\t\n\t<div id=\"text-2815810683\" class=\"text fadein-left\">\n\t\t\n<p><img decoding=\"async\" class=\"product-img\" src=\"\/wp-content\/uploads\/2023\/07\/ZHT-200.png\" \/><br \/>\n\t\t\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n\n\t<div id=\"col-1319060988\" class=\"col medium-6 small-11 large-6\"  >\n\t\t<div class=\"col-inner text-left\"  >\n\t\t\t\n\t\t\t\n\t<div id=\"text-2718712892\" class=\"text fadein-right\">\n\t\t\n<h2 class=\"primary-title\">Coat Developer Equipment<\/h2>\n<h4>ZHT-200, 8 &#038; 6 inches or compatible<\/h4>\n\t\t\t<\/div>\n\t\n<div class=\"slider-wrapper relative content-slider fadein-right\" id=\"slider-2058093554\" >\n    <div class=\"slider slider-nav-dots-simple slider-nav-circle slider-nav-large slider-nav-light slider-style-normal\"\n        data-flickity-options='{\n            \"cellAlign\": \"center\",\n            \"imagesLoaded\": true,\n            \"lazyLoad\": 1,\n            \"freeScroll\": false,\n            \"wrapAround\": true,\n            \"autoPlay\": 2000,\n            \"pauseAutoPlayOnHover\" : true,\n            \"prevNextButtons\": false,\n            \"contain\" : true,\n            \"adaptiveHeight\" : true,\n            \"dragThreshold\" : 10,\n            \"percentPosition\": true,\n            \"pageDots\": true,\n            \"rightToLeft\": false,\n            \"draggable\": true,\n            \"selectedAttraction\": 0.1,\n            \"parallax\" : 0,\n            \"friction\": 0.6        }'\n        >\n        \n\t<section class=\"section\" id=\"section_14745466\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<ul>\n<li>Applicable wafer size: 8 &amp; 6 inches or compatible<\/li>\n<li>Equipment size: 1850*1700*2600mm (Single block)<br \/>3110*1700*2500mm (Open-type dual block) <\/li>\n<li>Warping degree: \u00b11mm<\/li>\n<li>Application fields: Silicon based, silicon carbide, gallium nitride, filters, gallium arsenide, advanced packaging and other fields<\/li>\n<\/ul>\n<p style=\"font-weight:bold\">Product Advantages:<\/p>\n<ol class=\"zhl-200-feature\">\n<li>Able to support flexible customization of multiple units\n<\/li>\n<li>Able to support I-Line lithography machine and KRF process<\/li>\n<li>Able to support composite boards and circulating water temperature control cooling boards\n<\/li>\n<li>Able to support digital collection of process parameters<\/li>\n<li>Able to support remote monitoring system<\/li>\n<li>Able to support the EAP system<\/li>\n<\/ol>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_14745466 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section\" id=\"section_429143007\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<p style=\"font-weight:bold\">Technical Parameters:<\/p>\n<ol class=\"zhl-200-feature\">\n<li>Speed range: 0-6000rpm\n<\/li>\n<li>Acceleration range: 0-50000rpm\/sec<\/li>\n<li>Speed accuracy: \u00b1 1rpm\n<\/li>\n<li>Hot plate temperature range: 50-200 \u2103\n<\/li>\n<li>Temperature uniformity of hot plate:<br \/>50.0\u2103 ~ 120.0\u2103 : Range \u2264 0.4\u2103<br \/>\n120.1\u2103 ~ 150.0\u2103 : Range \u2264 0.8\u2103<br \/>\n150.1\u2103 ~ 200.0\u2103 : Range \u2264 1.2\u2103<\/li>\n<li>Cold Plate Temperature Range: 20-30\u2103\n<\/li>\n<li>Uniformity of cold plate temperature: \u00b10.2\u2103\n<\/li>\n<li>Applicable photoresist: Max20000CP\n<\/li>\n<li>Rubber pump type: Cylinder\/Motor Type pump\n<\/li>\n<li>Photoresist or developer tubing: PFA\n<\/li>\n<li>Traffic monitoring: Flowmeter + Contra ejaculation sensor\/Fin flow\/ ultrasonic flowmeter\n<\/li>\n<\/ol>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_429143007 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n}\n<\/style>\n\t<\/section>\n\t\n     <\/div>\n\n     <div class=\"loading-spin dark large centered\"><\/div>\n\n     <\/div>\n\n\n\t<div id=\"text-868136342\" class=\"text fadein-right\">\n\t\t\n<div><a class=\"button secondaryis-outline\" href=\"\/en\/zht-200\">Details<\/a><\/div>\n\t\t\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n<\/div>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_1645224980 {\n  padding-top: 20px;\n  padding-bottom: 20px;\n  background-color: rgb(255, 255, 255);\n}\n@media (min-width:550px) {\n  #section_1645224980 {\n    padding-top: 0px;\n    padding-bottom: 0px;\n  }\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section product-6-sec product-sec slider-1-en\" id=\"section_338444237\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<span class=\"scroll-to\" data-label=\"Scroll to: #product2\" data-bullet=\"false\" data-link=\"#product2\" data-title=\"Change this\"><a name=\"product2\"><\/a><\/span>\n<div class=\"row row-collapse align-equal align-center\"  id=\"row-1018306266\">\n\n\t<div id=\"col-409031868\" class=\"col medium-6 small-11 large-6\"  >\n\t\t<div class=\"col-inner text-left dark\"  >\n\t\t\t\n\t\t\t\n\t<div id=\"text-2141643461\" class=\"text fadein-left\">\n\t\t\n<p><img decoding=\"async\" class=\"product-img\" src=\"\/wp-content\/uploads\/2023\/07\/ZHT-150-cropped.png\" \/><br \/>\n\t\t\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n\n\t<div id=\"col-1255062515\" class=\"col medium-6 small-11 large-6\"  >\n\t\t<div class=\"col-inner text-left dark\"  >\n\t\t\t\n\t\t\t\n\t<div id=\"text-2202030083\" class=\"text fadein-right\">\n\t\t\n<h2 class=\"primary-title\">Coat Developer Equipment<\/h2>\n<h4>ZHT-150<\/h4>\n\t\t\t<\/div>\n\t\n<div class=\"slider-wrapper relative content-slider fadein-right\" id=\"slider-1005760376\" >\n    <div class=\"slider slider-nav-dots-simple slider-nav-circle slider-nav-large slider-nav-light slider-style-normal\"\n        data-flickity-options='{\n            \"cellAlign\": \"center\",\n            \"imagesLoaded\": true,\n            \"lazyLoad\": 1,\n            \"freeScroll\": false,\n            \"wrapAround\": true,\n            \"autoPlay\": 2000,\n            \"pauseAutoPlayOnHover\" : true,\n            \"prevNextButtons\": false,\n            \"contain\" : true,\n            \"adaptiveHeight\" : true,\n            \"dragThreshold\" : 10,\n            \"percentPosition\": true,\n            \"pageDots\": true,\n            \"rightToLeft\": false,\n            \"draggable\": true,\n            \"selectedAttraction\": 0.1,\n            \"parallax\" : 0,\n            \"friction\": 0.6        }'\n        >\n        \n\t<section class=\"section\" id=\"section_520172714\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<ul>\n<li>Applicable wafer size: 6 &amp; 4 inches or compatible<\/li>\n<li>Equipment size: 1750*1820*2850mm<\/li>\n<li>Warping degree: \u00b10.3mm<\/li>\n<li>Application fields: optical communication, compound semiconductors, power devices, Micro LEDs, etc<\/li>\n<\/ul>\n<p style=\"font-weight:bold\">Product Advantages:<\/p>\n<ol class=\"zhl-200-feature\">\n<li>Integrated design, with small equipment footprint and high stability\n<\/li>\n<li>Able to support G-line and I-Line processes\n<\/li>\n<li>Customized function development can be carried out according to customer requirements<\/li>\n<li>Localization of components with high cost-effectiveness<\/li>\n<li>Able to support SECS communication<\/li>\n<\/ol>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_520172714 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section\" id=\"section_487963575\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<p style=\"font-weight:bold\">Technical Parameters:<\/p>\n<ol class=\"zhl-200-feature\">\n<li>Speed range: 0-6000rpm\n<\/li>\n<li>Acceleration range: 0-50000rpm\/sec<\/li>\n<li>Speed accuracy: \u00b1 1rpm\n<\/li>\n<li>Hot plate temperature range: 50-200 \u2103\n<\/li>\n<li>Temperature uniformity of hot plate:<br \/>50.0\u2103 ~ 120.0\u2103 : Range \u2264 0.4\u2103<br \/>\n120.1\u2103 ~ 150.0\u2103 : Range \u2264 0.8\u2103<br \/>\n150.1\u2103 ~ 200.0\u2103 : Range \u2264 1.2\u2103<\/li>\n<li>Cold Plate Temperature Range: 20-30\u2103\n<\/li>\n<li>Uniformity of cold plate temperature: \u00b12\u2103\n<\/li>\n<li>Applicable photoresist: Max 800CP\n<\/li>\n<li>Rubber pump type: Cylinder\/Motor Type pump\n<\/li>\n<li>Photoresist or developer tubing: PFA\n<\/li>\n<li>Traffic monitoring: Flowmeter + Contra ejaculation sensor\n<\/li>\n<\/ol>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_487963575 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n}\n<\/style>\n\t<\/section>\n\t\n     <\/div>\n\n     <div class=\"loading-spin dark large centered\"><\/div>\n\n     <\/div>\n\n\n\t<div id=\"text-1650540678\" class=\"text fadein-right\">\n\t\t\n<div><a class=\"button white\" href=\"\/en\/equipment-zht-150\/\">Details<\/a><\/div>\n\t\t\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n<\/div>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_338444237 {\n  padding-top: 20px;\n  padding-bottom: 20px;\n  background-color: rgb(255, 255, 255);\n}\n@media (min-width:550px) {\n  #section_338444237 {\n    padding-top: 0px;\n    padding-bottom: 0px;\n  }\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section product-4-sec product-sec\" id=\"section_103263445\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<span class=\"scroll-to\" data-label=\"Scroll to: #product3\" data-bullet=\"false\" data-link=\"#product3\" data-title=\"Change this\"><a name=\"product3\"><\/a><\/span>\n<div class=\"row row-collapse align-equal align-center\"  id=\"row-1582583161\">\n\n\t<div id=\"col-1640926022\" class=\"col medium-6 small-11 large-6\"  >\n\t\t<div class=\"col-inner text-left dark\"  >\n\t\t\t\n\t\t\t\n\t<div id=\"text-1401971508\" class=\"text fadein-left\">\n\t\t\n<p><img decoding=\"async\" class=\"product-img\" src=\"\/wp-content\/uploads\/2023\/07\/ZHT-300.png\" \/><br \/>\n\t\t\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n\n\t<div id=\"col-17248326\" class=\"col medium-6 small-11 large-6\"  >\n\t\t<div class=\"col-inner text-left\"  >\n\t\t\t\n\t\t\t\n\t<div id=\"text-4209956215\" class=\"text fadein-right\">\n\t\t\n<h2 class=\"primary-title\">Coat Developer Equipment<\/h2>\n<h4>ZHT-300, 12&#038;8inch<\/h4>\n<p>Application fields: Silicon based PI technology, advanced packaging and other fields.<\/p>\n<p style=\"font-weight: bold;\">Product advantages:<\/p>\n<ol class=\"zhl-200-feature\">\n<li>Connecting to the lithography machine and complete the automated production of the lithography process<\/li>\n<li>Meeting the high-precision process requirements with self-developed high-precision cold and hot plates<\/li>\n<li>Compatible with both products 200mm\/300mm<\/li>\n<li>Stacked structural layout with high output per unit area<\/li>\n<li>Able to support SECS communication and AMHS system<\/li>\n<li>Able to configure equipment according to customer requirements<\/li>\n<li>Localization of components, reducing costs significantly<\/li>\n<\/ol>\n<div><a class=\"button secondaryis-outline\" href=\"\/en\/zht-300\">Details<\/a><\/div>\n\t\t\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n<\/div>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_103263445 {\n  padding-top: 20px;\n  padding-bottom: 20px;\n  background-color: rgb(255, 255, 255);\n}\n@media (min-width:550px) {\n  #section_103263445 {\n    padding-top: 0px;\n    padding-bottom: 0px;\n  }\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section product-5-sec product-sec slider-2-en\" id=\"section_576046726\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<span class=\"scroll-to\" data-label=\"Scroll to: #product4\" data-bullet=\"false\" data-link=\"#product4\" data-title=\"Change this\"><a name=\"product4\"><\/a><\/span>\n<div class=\"row row-collapse align-equal align-center\"  id=\"row-1628225573\">\n\n\t<div id=\"col-407264485\" class=\"col medium-6 small-11 large-6\"  >\n\t\t<div class=\"col-inner text-left dark\"  >\n\t\t\t\n\t\t\t\n\t<div id=\"text-3309902102\" class=\"text fadein-left\">\n\t\t\n<h2 class=\"primary-title\">Vertical Furnace<\/h2>\n<h4>ZHL-200, 8\uff5e6inch<\/h4>\n\t\t\t<\/div>\n\t\n<div class=\"slider-wrapper relative content-slider fadein-left\" id=\"slider-997323961\" >\n    <div class=\"slider slider-nav-dots-simple slider-nav-circle slider-nav-large slider-nav-light slider-style-normal\"\n        data-flickity-options='{\n            \"cellAlign\": \"center\",\n            \"imagesLoaded\": true,\n            \"lazyLoad\": 1,\n            \"freeScroll\": false,\n            \"wrapAround\": true,\n            \"autoPlay\": 2000,\n            \"pauseAutoPlayOnHover\" : true,\n            \"prevNextButtons\": false,\n            \"contain\" : true,\n            \"adaptiveHeight\" : true,\n            \"dragThreshold\" : 10,\n            \"percentPosition\": true,\n            \"pageDots\": true,\n            \"rightToLeft\": false,\n            \"draggable\": true,\n            \"selectedAttraction\": 0.1,\n            \"parallax\" : 0,\n            \"friction\": 0.6        }'\n        >\n        \n\t<section class=\"section\" id=\"section_1711450285\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<p>(Vertical furnace)<\/p>\n<p>Size: 900 x 1900 x 3060mm<\/p>\n<p>Widely used in silicon-based, compound semiconductors, filters, advanced packaging, power devices, Micro LEDs and other fields.<\/p>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_1711450285 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section\" id=\"section_110110174\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<p style=\"font-weight: bold;\">Technical Parameters:\n<\/p>\n<ol class=\"zhl-200-feature\">\n<li>Wafer size: 200mm. (or 150mm)\n<\/li>\n<li>Batch size: 150wafers\/1tube\n<\/li>\n<li>Process pressure: atmospheric pressure\/low pressure\n<\/li>\n<li>Power consumption: MAX 3\u03a6, 480VAC, 200A, 60Hz\n<\/li>\n<li>Cooling water\uff1a5kgf\/cm2 <\/li>\n<li>Exhaust system: 1500CFM<\/li>\n<\/ol>\n<div class=\"product-table\">\n<table>\n<tbody>\n<tr>\n<td>H2 Anneal\n<\/td>\n<td>Dry\/Wet Oxidation<\/td>\n<td>Alloy\n<\/td>\n<\/tr>\n<tr>\n<td>Forming Gas<br \/>\nAnneal<\/td>\n<td>Hi temp process (max 1300\u2103)\n<\/td>\n<td>LTO\n<\/td>\n<\/tr>\n<tr>\n<td>TEOS\n<\/td>\n<td>Nitride\n<\/td>\n<td>Poly\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_110110174 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n}\n<\/style>\n\t<\/section>\n\t\n     <\/div>\n\n     <div class=\"loading-spin dark large centered\"><\/div>\n\n     <\/div>\n\n\n\t<div id=\"text-1260307457\" class=\"text fadein-left\">\n\t\t\n<div><a class=\"button white\" href=\"\/en\/zhf-200\">Details<\/a><\/div>\n\t\t\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n\n\t<div id=\"col-1177140244\" class=\"col medium-6 small-11 large-6\"  >\n\t\t<div class=\"col-inner text-left dark\"  >\n\t\t\t\n\t\t\t\n<div class=\"absolute-img\"><img decoding=\"async\" src=\"\/wp-content\/uploads\/2021\/12\/rightbgx1.png\" \/><\/div>\n<div class=\"fadein-right\"><img decoding=\"async\" class=\"product-img\" src=\"\/wp-content\/uploads\/2024\/06\/Picture1.png\" \/><\/div>\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n<\/div>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_576046726 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n  background-color: rgb(255, 255, 255);\n}\n@media (min-width:550px) {\n  #section_576046726 {\n    padding-top: 0px;\n    padding-bottom: 0px;\n  }\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section product-6-sec product-sec slider-3-en\" id=\"section_842214945\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<span class=\"scroll-to\" data-label=\"Scroll to: #product5\" data-bullet=\"false\" data-link=\"#product5\" data-title=\"Change this\"><a name=\"product5\"><\/a><\/span>\n<div class=\"row row-collapse align-equal align-center\"  id=\"row-1008376125\">\n\n\t<div id=\"col-1981204815\" class=\"col medium-6 small-11 large-6\"  >\n\t\t<div class=\"col-inner text-left dark\"  >\n\t\t\t\n\t\t\t\n\t<div id=\"text-665080241\" class=\"text fadein-left\">\n\t\t\n<p><img decoding=\"async\" class=\"product-img\" src=\"\/wp-content\/uploads\/2024\/06\/Picture2.png\" \/><br \/>\n\t\t\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n\n\t<div id=\"col-1793860633\" class=\"col medium-6 small-11 large-6\"  >\n\t\t<div class=\"col-inner text-left dark\"  >\n\t\t\t\n\t\t\t\n\t<div id=\"text-1135133371\" class=\"text fadein-right\">\n\t\t\n<h2 class=\"primary-title\">RTP<\/h2>\n<h4>ZHR-200, 8\uff5e6inch<\/h4>\n\t\t\t<\/div>\n\t\n<div class=\"slider-wrapper relative content-slider fadein-right\" id=\"slider-941069144\" >\n    <div class=\"slider slider-nav-dots-simple slider-nav-circle slider-nav-large slider-nav-light slider-style-normal\"\n        data-flickity-options='{\n            \"cellAlign\": \"center\",\n            \"imagesLoaded\": true,\n            \"lazyLoad\": 1,\n            \"freeScroll\": false,\n            \"wrapAround\": true,\n            \"autoPlay\": 2000,\n            \"pauseAutoPlayOnHover\" : true,\n            \"prevNextButtons\": false,\n            \"contain\" : true,\n            \"adaptiveHeight\" : true,\n            \"dragThreshold\" : 10,\n            \"percentPosition\": true,\n            \"pageDots\": true,\n            \"rightToLeft\": false,\n            \"draggable\": true,\n            \"selectedAttraction\": 0.1,\n            \"parallax\" : 0,\n            \"friction\": 0.6        }'\n        >\n        \n\t<section class=\"section\" id=\"section_221862486\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<p>Size: 1200 x 1730 x 2045mm<\/p>\n<p>>Widely used in silicon-based, compound semiconductors, filters, advanced packaging, power devices, Micro LEDs and other fields.<\/p>\n<p style=\"font-weight: bold;\">Product Advantages:<\/p>\n<ol class=\"zhl-200-feature\">\n<li>Temperature range: 400~1300\u2103<\/li>\n<li>SEMI S2 certification, including toxic gas options, using NH3 for advanced applications<\/li>\n<li>Halogen lamp series: Max 1200deg.C<\/li>\n<li>Best Environmental Control &lt;2ppm O2 &#8211; Low concentration treatment with high TPT<\/li>\n<li>Occupied area 1.8m\u00b2- High utilization of clean room space and high wafer yield per unit area<\/li>\n<li>Communication Protocol \u2013 Fast, Easy, and Efficient Maintenance<\/li>\n<\/ol>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_221862486 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section\" id=\"section_1258035081\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<div class=\"product-table table-2\">\n<table>\n<thead>\n<tr>\n<th>No<\/th>\n<th>stage<\/th>\n<th>Purpose<\/th>\n<th>Quantity<\/th>\n<th>Slot<\/th>\n<th>Technical parameters<\/th>\n<th>note<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>1<\/td>\n<td>Cassette Stage A, B<\/td>\n<td>Cassette 6\u201d or 8\u201d<\/td>\n<td>2<\/td>\n<td>25(26)<\/td>\n<td>1) Detection Sensor by Cassette Size<br \/>2) Wafer Slide Detection Sensor<\/td>\n<td>\u2013<\/td>\n<\/tr>\n<tr>\n<td>2<\/td>\n<td>Wafer Aligner<\/td>\n<td>Wafer Centering<\/td>\n<td>1<\/td>\n<td>1<\/td>\n<td>1) Drive by Air Cylinder2) Wafer Detection Sensor3) Chuck Material : Peek<\/td>\n<td>\u2013<\/td>\n<\/tr>\n<tr>\n<td>3<\/td>\n<td>Robot<\/td>\n<td>Wafer Conveying<\/td>\n<td>1<\/td>\n<td>1<\/td>\n<td>1) Wafer Detection Sensor (Vaccum)2) Chuck Material : Peek<\/td>\n<td>\u2013<\/td>\n<\/tr>\n<tr>\n<td>4<\/td>\n<td>Dummy Stage<\/td>\n<td>Dummy Wafer Stock<\/td>\n<td>1<\/td>\n<td>2<\/td>\n<td>1) Stage Material : POM<\/td>\n<td>\u2013<\/td>\n<\/tr>\n<tr>\n<td>5<\/td>\n<td>Cool Stage A, B<\/td>\n<td>Wafer Cooling<\/td>\n<td>2<\/td>\n<td>1<\/td>\n<td>1) Cooling Method : Cooling Water2) Wafer Detection Sensor3) Drive by Air Cylinde4) Stage Material : SUS 3045) Pin Material : Quartz<\/td>\n<td>\u2013<\/td>\n<\/tr>\n<tr>\n<td>6<\/td>\n<td>Wafer Stock<\/td>\n<td>Susceptor Stock Slot<\/td>\n<td>1<\/td>\n<td>5<\/td>\n<td>1) 5-Slot (6:\u201d Wafer)2) Material : POM<\/td>\n<td>SPECIAL OPTION<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_1258035081 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n}\n<\/style>\n\t<\/section>\n\t\n     <\/div>\n\n     <div class=\"loading-spin dark large centered\"><\/div>\n\n     <\/div>\n\n\n\t<div id=\"text-452799757\" class=\"text fadein-right\">\n\t\t\n<div><a class=\"button white\" href=\"\/en\/zhr-200\/\">Details<\/a><\/div>\n\t\t\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n<\/div>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_842214945 {\n  padding-top: 20px;\n  padding-bottom: 20px;\n  background-color: rgb(255, 255, 255);\n}\n@media (min-width:550px) {\n  #section_842214945 {\n    padding-top: 0px;\n    padding-bottom: 0px;\n  }\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section product-5-sec product-sec slider-4-en\" id=\"section_407654482\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<span class=\"scroll-to\" data-label=\"Scroll to: #product6\" data-bullet=\"false\" data-link=\"#product6\" data-title=\"Change this\"><a name=\"product6\"><\/a><\/span>\n<div class=\"row row-collapse align-equal align-center\"  id=\"row-187594850\">\n\n\t<div id=\"col-327700528\" class=\"col medium-6 small-11 large-6\"  >\n\t\t<div class=\"col-inner text-left dark\"  >\n\t\t\t\n\t\t\t\n\t<div id=\"text-576315530\" class=\"text fadein-left\">\n\t\t\n<h2 class=\"primary-title\">Single wafer Scrubber clean tool<br \/>\n<\/h2>\n<h4>ZHS-200, 8~6inch<\/h4>\n\t\t\t<\/div>\n\t\n<div class=\"slider-wrapper relative content-slider fadein-left\" id=\"slider-1334157603\" >\n    <div class=\"slider slider-nav-dots-simple slider-nav-circle slider-nav-large slider-nav-light slider-style-normal\"\n        data-flickity-options='{\n            \"cellAlign\": \"center\",\n            \"imagesLoaded\": true,\n            \"lazyLoad\": 1,\n            \"freeScroll\": false,\n            \"wrapAround\": true,\n            \"autoPlay\": 2000,\n            \"pauseAutoPlayOnHover\" : true,\n            \"prevNextButtons\": false,\n            \"contain\" : true,\n            \"adaptiveHeight\" : true,\n            \"dragThreshold\" : 10,\n            \"percentPosition\": true,\n            \"pageDots\": true,\n            \"rightToLeft\": false,\n            \"draggable\": true,\n            \"selectedAttraction\": 0.1,\n            \"parallax\" : 0,\n            \"friction\": 0.6        }'\n        >\n        \n\t<section class=\"section\" id=\"section_67001566\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<p>4 positive configurations WPH \uff1e160 pieces<br \/>2 positive and 2 negative configurations WPH \uff1e100 pieces<\/p>\n<p style=\"text-align: left; font-weight: bold;\">Application fields:<\/p>\n<p>Silicon based, compound semiconductors, filters, advanced packaging, power devices, Micro LEDs and other fields.<\/p>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_67001566 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section\" id=\"section_203666261\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<p style=\"text-align: left; font-weight: bold;\">Product advantages:<\/p>\n<ol class=\"zhl-200-feature\">\n<li style=\"text-align: left;\">High quality \u2013 CLASS 10 environmental level; Static elimination system<\/li>\n<li>Diversity \u2013 different cleaning methods meet the needs of different processes<\/li>\n<li>Customization \u2013 configure according to customer needs<\/li>\n<li>Progressiveness \u2013 the latest operating system, software function diversity<\/li>\n<\/ol>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_203666261 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n}\n<\/style>\n\t<\/section>\n\t\n     <\/div>\n\n     <div class=\"loading-spin dark large centered\"><\/div>\n\n     <\/div>\n\n\n\t<div id=\"text-3934229510\" class=\"text fadein-left\">\n\t\t\n<div><a class=\"button white\" href=\"\/en\/zhs-200\/\">Details<\/a><\/div>\n\t\t\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n\n\t<div id=\"col-1401172078\" class=\"col medium-6 small-11 large-6\"  >\n\t\t<div class=\"col-inner text-left dark\"  >\n\t\t\t\n\t\t\t\n<div class=\"absolute-img\"><img decoding=\"async\" src=\"\/wp-content\/uploads\/2021\/12\/rightbgx1.png\" \/><\/div>\n<div class=\"fadein-right\"><img decoding=\"async\" class=\"product-img\" src=\"\/wp-content\/uploads\/2024\/06\/Picturex.png\" \/><\/div>\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n<\/div>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_407654482 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n  background-color: rgb(255, 255, 255);\n}\n@media (min-width:550px) {\n  #section_407654482 {\n    padding-top: 0px;\n    padding-bottom: 0px;\n  }\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section product-6-sec product-sec slider-4-en\" id=\"section_2008088806\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<span class=\"scroll-to\" data-label=\"Scroll to: #product7\" data-bullet=\"false\" data-link=\"#product7\" data-title=\"Change this\"><a name=\"product7\"><\/a><\/span>\n<div class=\"row row-collapse align-equal align-center\"  id=\"row-790311031\">\n\n\t<div id=\"col-872104209\" class=\"col medium-6 small-11 large-6\"  >\n\t\t<div class=\"col-inner text-left dark\"  >\n\t\t\t\n\t\t\t\n\t<div id=\"text-3511602481\" class=\"text fadein-left\">\n\t\t\n<p><img decoding=\"async\" class=\"product-img\" src=\"\/wp-content\/uploads\/2023\/07\/ZHS-200-cropped.png\" \/><br \/>\n\t\t\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n\n\t<div id=\"col-172986471\" class=\"col medium-6 small-11 large-6\"  >\n\t\t<div class=\"col-inner text-left dark\"  >\n\t\t\t\n\t\t\t\n\t<div id=\"text-3326351352\" class=\"text fadein-right\">\n\t\t\n<h2 class=\"primary-title\">Single wafer Scrubber clean tool<\/h2>\n<h4>ZHS-300, 12\uff5e8inch<\/h4>\n\t\t\t<\/div>\n\t\n<div class=\"slider-wrapper relative content-slider fadein-right\" id=\"slider-326655034\" >\n    <div class=\"slider slider-nav-dots-simple slider-nav-circle slider-nav-large slider-nav-light slider-style-normal\"\n        data-flickity-options='{\n            \"cellAlign\": \"center\",\n            \"imagesLoaded\": true,\n            \"lazyLoad\": 1,\n            \"freeScroll\": false,\n            \"wrapAround\": true,\n            \"autoPlay\": 2000,\n            \"pauseAutoPlayOnHover\" : true,\n            \"prevNextButtons\": false,\n            \"contain\" : true,\n            \"adaptiveHeight\" : true,\n            \"dragThreshold\" : 10,\n            \"percentPosition\": true,\n            \"pageDots\": true,\n            \"rightToLeft\": false,\n            \"draggable\": true,\n            \"selectedAttraction\": 0.1,\n            \"parallax\" : 0,\n            \"friction\": 0.6        }'\n        >\n        \n\t<section class=\"section\" id=\"section_703460931\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<p>8 positive configurations WPH \uff1e380 pieces<br \/>4 positive and 4 negative configurations WPH \uff1e200 pieces<\/p>\n<p style=\"text-align: left; font-weight: bold;\">Application fields:<\/p>\n<p>Silicon based, compound semiconductors, filters, advanced packaging, power devices, Micro LEDs and other fields.<\/p>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_703460931 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n}\n<\/style>\n\t<\/section>\n\t\n\t<section class=\"section\" id=\"section_805572404\">\n\t\t<div class=\"bg section-bg fill bg-fill  bg-loaded\" >\n\n\t\t\t\n\t\t\t\n\t\t\t\n\n\t\t<\/div>\n\n\t\t<div class=\"section-content relative\">\n\t\t\t\n<p style=\"text-align: left; font-weight: bold;\">Product advantages:<\/p>\n<ol class=\"zhl-200-feature\">\n<li style=\"text-align: left;\">High quality \u2013 CLASS 10 environmental level; Static elimination system<\/li>\n<li>Diversity \u2013 different cleaning methods meet the needs of different processes<\/li>\n<li>Customization \u2013 configure according to customer needs<\/li>\n<li>Progressiveness \u2013 the latest operating system, software function diversity<\/li>\n<\/ol>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_805572404 {\n  padding-top: 0px;\n  padding-bottom: 0px;\n}\n<\/style>\n\t<\/section>\n\t\n     <\/div>\n\n     <div class=\"loading-spin dark large centered\"><\/div>\n\n     <\/div>\n\n\n\t<div id=\"text-1634448657\" class=\"text fadein-right\">\n\t\t\n<div><a class=\"button white\" href=\"\/en\/zhs-300\/\">Details<\/a><\/div>\n\t\t\t<\/div>\n\t\n\t\t<\/div>\n\t\t\t<\/div>\n\n\t\n<\/div>\n\t\t<\/div>\n\n\t\t\n<style>\n#section_2008088806 {\n  padding-top: 20px;\n  padding-bottom: 20px;\n  background-color: rgb(255, 255, 255);\n}\n@media (min-width:550px) {\n  #section_2008088806 {\n    padding-top: 0px;\n    padding-bottom: 0px;\n  }\n}\n<\/style>\n\t<\/section>\n\t\n","protected":false},"excerpt":{"rendered":"","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"page-blank.php","meta":[],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v18.9 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Independent research and development - \u4f17\u9e3f\u534a\u5bfc\u4f53<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.zh-et.cn\/en\/independent-research-and-development\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Independent research and development - 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