Coat Developer Equipment

ZHT-200, 6-8 inch Parallel

ZHT-200 is an automatic coat&developer equipment which developed by ZHONG HONG. After coat-expose-Dev process, pattern displayed on the substrate material. It plays a very important role in photo process.

Product advantages:

  1. Flexible combination, multi-process support
  2. Support Inline lithography and KRF process
  3. Support Com 150mm&200mm product
  4. Support composite plate, support circulating water temperature control cooling plate
  5. Support digital collection of process parameters
  6. Support remote monitoring system
  7. Support automated transfer system
  8. Support the EAP system

Independent research and development

  • Software Running
  • Mechanical Transmission
  • Circuit Module
  • Unit for Coating
Compound Semiconductor

Process capacity: > 0.18um
Products: Gallium Arsenide (GaAs),
Gallium Nitride (GaN),
Silicon Carbide (SiC), Filter (Filter)


Process capacity: > 0.18um
Product: MEMS

Silicon-based Semiconductor

Process capacity: > 90nm
Products: IGBT, CMOS, MPU, MCU,
DSP, RAM, ROM, Flash